The isotope exchange depth profiling (IEDP) technique using SIMS and LEIS

Sputter Depth Profiling by SIMS; Calibration of SIMS Depth Scale Using Multi-layer Reference Materials

In-depth distribution of doping elements in shallow depth region is an important role of secondary ion mass spectrometry (SIMS) for the development of next-generation semiconductor devices. KRISS has developed two types of multi-layer reference materials by ion beam sputter deposition. A multiple delta-layer reference material where the layers of one element are very thin can be used to evaluat...

Development of a Depth Profiling Technique Using Diffuse Reflectance

Recent developments in FT—IR sampling techniques such as diffuse reflectance and photoacoustic spectroscopy are known to obtain new and novel information on solid polymers. In particular, depth profiling can be obtained from the surface using a potassium bromide overlayer. Photoacoustic spectroscopy using coupling gases with different polarizability allows one to determine the nature of absorbe...

Surface oxygen exchange between yttria-stabilised zirconia and a low-temperature oxygen rf-plasma

Isotope Exchange/Depth Profiling (IEDP) using Secondary Ion Mass Spectrometry (SIMS) has been used to determine the oxygen tracer diffusion and surface exchange coefficients of (100) oriented 9.5 mol% yttria stabilised zirconia single crystals. Exchange experiments performed with molecular oxygen are compared with the exchange using an oxygen plasma. The surface exchange coefficient for specime...

The use of nuclear reactions and SIMS for quantitative depth profiling of hydrogen in amorphous silicon

Glow Discharge Depth Profiling a Powerful Analytical Technique in Surface Engineering (TECHNICAL NOTE)

A variety of analytical techniques have been developed and employed to characterize the surfaces, subsurfaces and interfaces of surface engineering systems. They provide important information for quality control, process optimization and further development. Since the mid 1980's, glow discharge spectrometry (GDS) has emerged as an important and versatile technique for rapid depth profiling anal...